Authors:P. Rai-Choudhury, P. Rai-Choudhury,
Publisher: Institution Of Engineering And Technology
Keywords: microfabrication, micromachining, volume, handbook
Number of Pages: 702
Published: 1997-01-01
List price: $180.00
ISBN-10: 0852969112
ISBN-13: 9780852969113

Volume 2 of the Handbook focuses on the process technology and the numerous device applications using Micromachining and microfabrication. This handbook will be useful to researchers and engineers who are not yet specilists in the field and will serve as a reference book for experts. The material is presented in such a manner as to allow the book to be utilised as a comprehensive reference book.Also available:Physics and Technology of Hetrojunction Devices - ISBN 9780863412042Electrical Degradation and Breakdown in Polymers - ISBN 9780863411960The Institution of Engineering and Technology is o

Author: P. Rai-Choudhury
Publisher: SPIE-International Society for Optical Engine
Keywords: monograph, pm40, press, spie, microfabrication, micromachining, pm39, microlithography, vol, volume, handbook
Number of Pages: 692
Published: 1997-10-06
List price: $119.00
ISBN-10: 0819423793
ISBN-13: 9780819423795

Copublished with IEE. This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.

Author: Joseph McGeough
Publisher: CRC Press
Keywords: engineering, mechanical, dekker, materials, micromachining
Number of Pages: 416
Published: 2001-11-15
List price: $219.95
ISBN-10: 0824706447
ISBN-13: 9780824706449

Considers materials shaping processes used to produce engineering components of small geometry and high accuracy.

Authors:P. Rai-Choudhury, P. Rai-Choudhury,
Publisher: Institution Of Engineering And Technology
Keywords: materials, devices, series, volume, microfabrication, microlithography, micromachining, handbook
Number of Pages: 776
Published: 1997-01-01
List price: $180.00
ISBN-10: 0852969066
ISBN-13: 9780852969069

This authoritative handbook provides a comprehensive resource for process development and training, in both the microelectronics device manufacturing field and newer application areas, such as sensors, actuators and biomedical devices. The handbook is written by leading experts in the field, and may be used as a reference or text by researchers and engineers who are not expert in the area as well as a good reference for those who are.Also available: Electrical Degradation and Breakdown in Polymers - ISBN 9780863411960Physics and Technology of Hetrojunction Devices - ISBN 9780863412042The Insti

Author: P. Rai-Choudhury (Editor)
Publisher: SPIE Publications
Keywords: microlithography, monograph, vol, pm39, press, volume, micromachining, microfabrication, handbook, spie
Number of Pages: 768
Published: 1997-03-14
List price: $119.00
ISBN-10: 0819423785
ISBN-13: 9780819423788

Copublished with IEE. The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.Contents - Preface - Introduction - Optical Lithography - Electron Beam Lithography - X-ray Lithography - Deep-UV Resist Technology - Photomask fabrication procedures and limitations - Metrology Methods in Photolithography - Optical Lithography Modeling - Issues in Nanolithography for Quantum Effect Devi
  
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